| |
|
|
| |
|
| |
Principle of Operation |
Determination of the maximum light density on
the sample's surface, using an oscillating object lens. After each semi-period
of the oscillation, the profile value is available. Arbitrary profile steps
in the measurement range are reproduced within 5ms. Measurement results
are independent of the measurement direction. |
| |
Housing of the Controller |
260x180x80 mm, stand-alone unit |
| |
Sensor size |
132x111x50 mm (housing)
65xØ30 mm (object lens) |
| |
Measurement range |
1000 µm |
| |
Resolution |
20 nm |
| |
Straightness deviation |
Below 2.0µm over the measurement range
of 1.0mm |
| |
Reproducibility |
Standard deviation <= 15 nm (50 measurements
on a step standard of 504µm) |
| |
Stand-off |
13,5 mm |
| |
Laser source |
780nm semiconductor laser diode. |
| |
Laser class |
|
Laser class 1 according to DIN EN 31252 |
|
| |
Measurement spot diameter |
2.0µm, diffraction-limited |
| |
Maximum surface tilt |
90° +/- 25° on a mirror, more on scattering
surfaces |
| |
Dynamical range |
Accepts reflection signal ratio greater than
5000:1 within a single range, independent of measurement speed |
| |
Sampling frequency |
16Hz -1kHz, independent of the surface |
| |
Signal rise time |
5 ms |
| |
Data transmission |
RS232 1000 samples/s |
| |
Internal buffer |
none |
| |
Weight |
approx. 2 kg sensor
approx. 4 kg controller |
| |
Options |
analogue output, 0 to 10V for profile and reflection
signal |
| |
|
|
|
