Sample Applications:
Bumps on a wafer
Fibre fixture
Contacts on a chip card
The confocal sensor Tele is designated for the non-contacting measurement of technical surfaces. Due to extraordinary dynamic range in combination with high measurement speed and easy operation, the Tele sensor perfectly matches the requirements of complex topographies and automated measurement tasks. The large stand off simplifies measurements in industrial or inaccessible environments.

Principle of operation

The application of the Tele sensor includes:

  • measurement tasks in pockets, or samples within fixtures
  • measurements on sensitive, soft or liquid samples
  • determination of flatness, altitude or position
  • calculation of secondary properties like area, thickness or volume
  • automatic measurement procedures, operation with varying staff

including the following applications:

  • micromechanical engineering
  • electrical engineering, optics, thick film and hybrids, electronics industry
  • plastics and paper industry
  • IC packaging (warpage, coplanarity, bump height and volume)
  • tool industry, mechanical engineering
 
>> Technical data of the Tele sensor

>> Datasheet of the Tele sensor (pdf format, 120kB)