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Linear stage specification |
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Travel |
- 50 x 50 mm
- 100 x 100 mm
- 150 x 150 mm
- 200 x 200 mm
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Repeatability (unidirectional) |
0.5 µm |
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Hysterisis |
3 µm |
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Deviation of straightness
(single axis) |
- 0.2µm over 10 mm
- 0.5µm over 50 mm
- 1µm over 100 mm
- 2µm over 200 mm
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Maximum speed |
30 mm/sec |
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Spindle |
recirculating ball screw, screw pitch 1 mm/rev |
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Lateral resolution |
0.5 µm |
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Maximum mass of sample |
15 kg |
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Sensor specification |
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Measurement range |
- 1.5 mm, autofocus AF16
- 1.0 mm, confocal sensor KF2, Tele
- 0.3 mm (0.5 mm max.), white light sensor C1
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Resolution |
- 10 nm, autofocus AF16
- 20 nm, confocal sensor KF3, Tele
- 25 nm, white light sensor C1
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Interface specification |
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Motor controller interface |
RS232, 19200 bd |
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Dimensions |
400 x 350 x 350 mm for the 50x50 mm system |
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Weight |
40 kg for the 50x50 mm system |
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