|
|
The Hyperion
system is a precision measurement instrument for non-contacting
acquisition of the 2D and 3D topography. All OPM sensors can
easily be fitted to the system, allowing for the measurement
of vertical structures up to 1.5mm with a resolution up to 10nm.
The Hyperion system consists of two precision linear stages,
the measurement stand with integrated DC motor controller, a
PC and the measurement and evaluation software Inspector.
Several software packages are available for advanced evaluation
of the measurement data.
|
|
|
|
|
- small size, low weight in combination with highest precision
- integrated motor electronics, no PC plug-in cards required.
Laptop option available.
- suitability for various measurement tasks due to different
sensors and extensible software design.
- on-line observation of the measurement spot (AF16 with integrated
microscope)
- extensive analysis- and evaluation capabilities due to different
software packages.
- superior price-to-performance ratio
- laboratory, institute or industrial applications
- micro mechanics and nano- technology
- quality assurance
|
|
