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Principle of Operation |
Determination of the maximum
light density on the sample's surface, using an oscillating object lens.
After each semi-period of the oscillation, the profile value is available.
Arbitrary profile steps in the measurement range are reproduced within
5ms. Measurement results are independent of the measurement
direction. |
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Housing of the
Controller |
260x180x80 mm, stand-alone
unit |
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Sensor size |
122x70x27 mm |
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Measurement range |
1000 µm |
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Resolution |
20 nm |
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Straightness deviation |
Below 1.0 µm over the
measurement range of 1000 µm |
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Reproducibility |
Standard deviation
<= 15 nm (50 measurements on a step standard of 504 µm) |
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Stand-off |
4 mm |
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Laser source |
670 nm semiconductor laser
diode. |
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Laser class |
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Laser class 2 according to
DIN EN 31252 | |
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Measurement spot
diameter |
1.7 µm,
diffraction-limited |
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Maximum surface tilt |
90° +/- 25° on a mirror, more on
scattering surfaces |
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Dynamical range |
Accepts reflection signal
ratio greater than 5000:1 within a single range, independent of
measurement speed |
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Sampling frequency |
16Hz -1kHz, independent of
the surface |
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Signal rise time |
5 ms |
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Data transmission |
RS232 1000 samples/s in realtime |
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Internal buffer |
none |
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Weight |
approx. 250 g sensor
approx 4,0 kg controller |
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Options |
analogue output, 0 to 10V
for profile and reflection signal |
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