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Principle of Operation |
Dynamical focussing based on astigmatic detection.
This detection principle is symmetric around the optical axis and does not
exhibit any preference of direction. Technical surfaces can be measured
in any direction. The measurement results are independent of the measurement
direction. |
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Housing of the Controller |
Stand-alone unit, or 19"-rack |
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Microscope |
Integrated bright-field microscope with a field
of view of 800 x 600 µm. The microscope allows for a simple and precise
positioning of the sensor. The image is axially taken through the sensor's
objective and shows the measurement spot even during measurement |
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Measurement range |
1,5 mm |
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Resolution |
10nm, 17,2 bit. The measurement signal is generated
by a glass scale of highest quality. The physical reference of the glass
scale allows for long-term stability and does not require periodic calibration. |
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Straightness deviation |
Below 0.2µm over the measurement range
of 1.5mm |
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Reproducibility |
Standard deviation <= 10 nm (50 measurements
on a step normal of 150µm) |
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Stand-off |
2.0mm |
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Laser source |
780nm semiconductor laser diode. |
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Laser class |
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Laser class 1 according to DIN EN 31252 |
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Measurement spot diameter |
1.9µm, diffraction-limited |
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Maximum surface tilt |
90° +/- 25° on a mirror, more on scattering
surfaces |
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Sampling frequency |
16Hz -10kHz, independent of the surface |
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Tracking speed |
60 mm/s (e.g. 950Hz on a sinusoidal profile of
20µm peak-to-peak) |
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Data transmission |
RS232
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max 1400 samples/s profile channel only
max 960 samples/s profile+reflection channel |
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Internal buffer |
64 kB |
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Weight |
approx. 5 kg sensor
approx. 4 kg controller |
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Technische Änderungen vorbehalten.
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